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51.
激光直写设备超精密平稳驱动技术的研究 总被引:1,自引:1,他引:0
在二元光学激光直写设备中,主轴的速度稳定性是影响光刻精度的主要原因之一。提出采用机电混合滤波器消除电机的轴向振动和径向振动对系统的影响,提高主轴系统瞬时运动的平稳性。利用鉴相器输出的频差与相差和主轴电机的速度对锁相调速系统的结构进行优化。同时,利用神经网络改善锁相环系统的非线性特性,并采用模糊参数自调整方法调节控制器的参数。结果表明使用机电混合滤波器可使主轴的轴向与径向振动小于20nm,采用改进的锁相环控制可大大提高主轴的调速范围,并改善其动态性能。 相似文献
52.
A novel optimal Finite Word Length (FWL) controller design is proposed in the framework of μ theory. A computationally tractable close-loop stability measure with FWL implementation considerations of the controller is derived based on the μ theory, and the optimal FWL controller realizations are obtained by solving the resulting optimal FWL realization problem using linear matrix inequality techniques. 相似文献
53.
A multivariable analog system can be controlled by a sampled-data compensator. A conic sector that can be used to analyze the closed-loop stability and robustness of this feedback system is presented in this letter. 相似文献
54.
In this paper we discuss a real-life case study to optimize the logistics network for the collection of containers from end-of-life
vehicle dismantlers in the Netherlands. Advanced planning concepts, such as dynamic assignment of dismantlers to logistic
service providers, are analyzed using a simulation model. Based on this model, we periodically solve a vehicle routing problem
to gain insight into the long-term performance of the system. The vehicle routing problem considered is a multi-depot pickup
and delivery problem with alternative delivery locations. A special characteristic of the problem is the limited vehicle capacity
of two containers. We solve this problem with a heuristic based on route generation and set partitioning. 相似文献
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In this paper, plant-wide control for the production of ethyl acetate using reactive distillation is studied. Four important issues are considered in developing control schemes, including: (1) economics; (2) steady-state deviation of key product purities; (3) controllability in terms of degree of oscillation and settling time; and (4) feasible region of disturbances for effective control. Starting with two basic control schemes that have been studied before, new control schemes are developed to improve the operability of the process. These new control schemes have evolved from the basic schemes by making a trade-off between optimal design and control or by selecting sensor locations using closed-loop sensitivity analysis. It is found that, while being subjected to fluctuations in the composition of the acid feed or in the production flow-rate, sensor location based on traditional open-loop sensitivity causes a larger overshoot and steady-state deviation of key product purities. Sensor location on the basis of a closed-loop sensitivity analysis provides a better alternative for feedback control. The resulting scheme for control is found to be effective in reducing the steady-state deviation and in promoting good control performance. 相似文献
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59.
本文论述了西门子6RA70装置在双边剪夹送辊传动系统中的应用,解决了夹送辊不同步而出现的钢板走偏问题。 相似文献
60.
This paper studies coordinated scheduling of production and logistics for a large-scale closed-loop manufacturing system by integrating its manufacturing and recycling process. In addition to the forward manufacturing process, different recycling units in reverse recycling process are also studied. A decentralized network is designed to formulate the coordinated scheduling problem as a mixed integer programming model with both binary and integer variables. As the problem for closed-loop manufacturing is large-scale and computational-consuming in nature, the model is divided into integer variable sub-models and complex binary variable sub-models for preprocessing and reprocessing respectively. An iterative solution approach by Benders decomposition is developed to accelerate the solving efficiency in large-scale case by updating custom constraints. A case study is conducted to investigate the managerial implications of the decentralized network for the closed-loop manufacturing system. Computational experiments demonstrate the validity and efficiency of the proposed iterative solution approach for the large-scale scenarios. 相似文献